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Sector of PVD Thin Films
Sector of PVD Thin Films
Dr. Sci. D.V. Shtansky
Magneton sputtering unit
Working assembly for magnetron sputtering
magnetron targets
ion source of slot type, 1.5-2 keB
rotating substrate holder
© 2024 NUST MISIS, SHS Center
Sector of PVD Thin Films
©
2024 NUST MISIS, SHS Center